Unlu, M.S.Bergstein, DavidRuane, MichaelGoldberg, B.B.2023-10-062023-10-06M. Unlu, D. bergstein, M. Ruane, B. Goldberg. "Structured substrates for optical surface profiling"11,275,030https://hdl.handle.net/2144/46858Patent2023-04-120000-0002-8594-892X (Unlu, ms)825309